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Simple MEMS Cantilever - No Electrodes
Posted Apr 28, 2020, 11:18 a.m. EDT MEMS & Nanotechnology, Acoustics & Vibrations, Structural Mechanics 0 Replies
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Dear All,
I am new here and I would like to model a simple cantilever with no electrodes to figure out its fundamental resonance peak, and its frequency response. Please advice: what module(s) and physics (more than one may be?) may I use? How simple of an approach can I start with? How may I start making it (the model still with no electrodes) more sophisticated? If I import the geometry, could I still make use of Comsol's work plane features? Would I be able to add an applied force (or pressure) to just a specific part (surface) of the cantilever (say the tip)? Should I choose that force to be of harmonic type so I can make use of it at the time of frequency response? Would I be able to see the peak amplitude at the resonance frequency (the actual graph)? My apologies for the long text and multiple questions, but I would appreciate any help with any part of it.
Sincerely,
Hello Behzad Jazizadeh
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