Dipolar Microwave Plasma Source
Application ID: 10512
This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves.
This is an advanced model that showcases many of the features that make COMSOL unique, including:
- Infinite elements for the magnetostatic model.
- Functional-based mesh adaption to create a fine mesh on the ECR surface.
- PMLs for the electromagnetic waves to represent
- Degrees of freedom for all 3 components of the high-frequency electric field despite the fact that the problem is geometrically axisymmetric.
- Full anisotropic tensors for the plasma conductivity and charged particle transport properties.
- Resonant power absorption in the ECR surface by the electrons.
- Equation-based modeling using integrated quantities to fix the total absorbed power.
- Solver sequencing to first compute the static magnetic field, then solve for all the plasma components.
This model requires the Plasma, AC/DC and RF modules.
This model example illustrates applications of this type that would nominally be built using the following products:Plasma Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.