Piezoelectric Rate Gyroscope
Application ID: 21471
This model shows how to analyze a tuning fork based piezoelectric rate gyroscope.
The reverse piezoelectric effect is used to drive an in-plane tuning fork mode. This mode is coupled to an out of plane mode by the Coriolis force and the resulting out of plane motion is sensed by the direct piezoelectric effect.
The geometry of the tuning forks is designed so that the eigenfrequencies of the nearby modes are separated in frequency space. The frequency response of the system is computed and the rotation rate sensitivity is evaluated.
This model example illustrates applications of this type that would nominally be built using the following products:MEMS Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- Acoustics Module, MEMS Module, or Structural Mechanics Module and
- AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.