S-Parameter of a Thin-Film BAW Resonator
Application ID: 67781
This model shows how to compute the S-parameter for a piezoelectric MEMS device by extending the tutorial Thin-Film BAW Composite Resonator. The measurement of S-parameter is commonly used to characterize such devices for RF applications. The terminal feature in the Electrostatics physics interface provides straightforward access to the computed S-parameters for frequency domain study types.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- Acoustics Module, MEMS Module, or Structural Mechanics Module and
- AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.