A Multi-Physics Framework for the Geometric Optimization of a Diaphragm Electrostatic Micropump

E. Bertarelli[1], R. Ardito[1], E. Bianchi[1], K. Laganà[1], A. Corigliano[1], G. Dubini[1], and R. Contro[1]

[1]Department of Structural Engineering, Politecnico di Milano, Milano, Italy
Published in 2009

In this work, an electrostatic diaphragm micropump is investigated by means of COMSOL Multiphysics®. A fluid-dynamic model is adopted to evaluate the fluid flow characteristics inside the pumping chamber, in static conditions. In parallel, electromechanical quasi-static simulations are performed to evaluate the occurrence of membrane movement and pull-in phenomena. Finally, a simplified fully-coupled electrostatic fluid-structure dynamic model is proposed, with the aim of appreciate the device performance in a true multi-physic and time-dependent framework. The final goal of this research activity is the design of an innovative device, which enables proper fluid actuation at low voltage. The task at this stage is the definition of a numerical design approach to optimize the device geometry and actuation, enabling a proper fluid transport.

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