M. Williams, J. Zito, J. Agashe, A. Sopeju, and D. Arnold
University of Florida, Gainesville, USA
This paper describes the design of a normally closed, electrodynamic microvalve. Magnetic forces between a permanent magnet in the valve cover and a soft magnet in the valve seat hold the valve closed. The combination of electrodynamic actuation and a mechanical restoring spring are used to open the valve. A device model and a design optimization strategy using COMSOL ...
J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...
H. Schweiger, T. Göstenkors, R. Bau, D. Zielke
Dept. Engineering Sciences and Mathematics, University of Applied Sciences Bielefeld, Bielefeld, Germany
In this paper we want to figure out the development of a capacitive acceleration-sensor system with the FEM-Method. The sensor-system is in the position to detect accelerations in the range of ±20 g. Furthermore the sensor-element contains a printed RF-inductance, which is used for contactless data transfer. On the one hand the simulation of the L-C-oscillating circuit using the RF Module of ...
K. PraveenKumar, P. Suresh, K. Subash, M. Alagappan, A. Gupta
PSG College of Technology, Coimbatore, Tamil Nadu, India.
In this work, we present the performance analysis of novel micro machined Piezoresistive fluid flow pressure sensor using COMSOL Multiphysics. The principle of the sensing mechanism is based on the deflection of four sensing layers embedded on a thin membrane. The fluid passes through the layer causes the deflection of the sensing layer which measures the pressure of the fluid. The following ...
K. Karthikeyan , L. Sujatha
Rajalakshmi Engineering College, Chennai, Tamil Nadu, India
This paper presents the design and simulation of micromixer for Lab-On-Chip (LOC) applications. There are two types of micromixers: one is an active micromixer and another one is a passive micromixer. This paper investigates microfluidic flow characterization and mixing rate of two fluids in a micro- channel. Understanding the microfluidic flow at the micro channel is a develop methods of mixing ...
M. Maitra , H. B. Nemade , S. Kundu ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The objective of this paper is to show the simulation of a piezoelectric thin film device and its application as a sensor. Piezoelectric aluminum nitride thin film clamped at two ends is simulated using COMSOL Multiphysics software. The device consists of the piezoelectric thin film suspended on a cavity etched on a silicon substrate. Two metal electrodes are placed at the two fixed sides of the ...
Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis
V. Mathur, K. Anglin, V.S. Prasher, K. Termkoa, S.R. Vangala, X. Qian, J. Sherwood, W.D. Goodhue, B. Haji-Saeed, and J. Khoury
Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA
Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...
J. Schumacher, P. Fideu, G. Ziegmann, and A. Herrmann
TU Clausthal-Institute of Polymere Materials and Plastic Engineering, Clausthal-Zellerfeld, Germany
CTC GmbH Stade, Stade, Germany
Faserinstitut Bremen e.V., Bremen, Germany
The current paper focuses on the creation of a consistent environment for the numerical prediction of the physical properties of polymer composite. A limitation factor for the successful simulation of composite processes is the correct estimation of the effective properties depending on several factors such as the constituents (fiber, polymer), the process setup. The numerical prediction of the ...
N. Das, C. R. Chaudhuri
Department of Electronics and Telecommunication, BESUS, Howrah, West Bengal, India
In this paper, we have proposed an impedance biosensor based on polymer nanowire (made of polyaniline) for efficient electric field mediated capture of biomolecules. Existing polymer nanowire based biosensors fail to achieve high sensitivity for low surface to volume ratio as the whole length of the nanowire is exposed to the analyte .Also biosensors are dependent on diffusion mediated capture ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...