3D Modeling of Microwave Plasma Using Funer Model

O. Geoffroy[1] and H. Rouch[1]
[1]INOPRO, Villard de Lans, France
Published in 2009

After previous microwave simulations done with very hard assumptions, we improve the model by using Funer model to improve prediction of plasma effects on the microwave coupling. Some parameters are still not well known and are used as adaptation parameters. An experience plan technique is used to find these parameters by comparison of experimental measurements of reflected power to simulated values. The results show quite good agreement with 4 experimental values of a real industrial example. Of course this rough comparison has to be followed by other comparisons with experimental measurements and model improvement for plasma chemistry aspects, but is a good starting point for microwave system simulation.