Here you will find presentations given at COMSOL Conferences around the globe. The presentations explore the innovative research and products designed by your peers using COMSOL Multiphysics. Research topics span a wide array of industries and application areas, including the electrical, mechanical, fluid, and chemical disciplines. Use the Quick Search to find presentations pertaining to your application area.

Positioning System for Particles in Microfluidic Structures

D. Kappe[1], A. Hütten[1]
[1]University of Bielefeld, Bielefeld, Germany

The possibility to detect and probe molecules in microfluidic devices gives rise to interesting applications. There are different approaches how to detect and probe particles, but a common step, for most methods, is to place the particles on a sensor. This can be done by applying external field gradients, or in this case by utilizing gravitational and hydrodynamic effects. Therefore, the sensor ...

Design and Simulation of Capacitive Pressure Sensor for Condition Monitoring

S. Sushma[1], R. Surekha[1], K. J. Rudhresha[1], S. Sahu [1], S. Singh4 [1], S. L. Pinjare6 [1],
[1] Dept. of ECE, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India.

This poster focuses on the development of a capacitive pressure sensor for condition monitoring applications. One method to measure vibrations is to mount an pressure sensor on the vibrating machinery or object and measure the pressure exerted due to vibrations. Measured pressure level helps to detect any deviations from the normal conditions.

Effect of Mass Adsorption on a Resonant NEMS

J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
Tres Cantos
Madrid, Spain

The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...

Xylophone Bar Magnetometry and Inertial-grade MEMS Optimisation: a Multiphysics Approach

H. T. D. Grigg, and B. J. Gallacher
Microsystems Group
Newcastle University
Newcastle upon Tyne
Tyne and Wear, UK

This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...

Design and Simulation of a Cantilever Array for Fluid Flow Sensing Applications

K. Kavitha[1], Y. R. Manjoosha[1], C. S. Sukanya[1], K. Saranya[1], K. Chandra Devi[1], M. Alagappan[1], A. Gupta[1]
[1]Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India

The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...

AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new

K. Park[1], S. Hamian[1], A. M. Gauffreau[2], T. Walsh[2]
[1]Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
[2]Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA

This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...

The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10.0 kHz and 86.8 kHz, respectively, within approximately 5 % of the experimentally measured resonances. The ...

A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...

µHeater on a Buckled Cantilever Plate for Gas Sensor Applications

A. Arpys Arevalo Carreno[1], E. Byas[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

In semiconductor gas sensors, the base of the gas detection is the interaction of the gaseous species at the surface of the semiconducting sensitive material. Since the chemical reactions at the surface of the sensor material are functions of temperature. We simulate our µHeater design on a Buckled Cantilever Plate (BCP). Such structure allows the sensor to be suspended for thermal insulation. ...

Mechanical Model of RF MEMS Capacitor Structures

R. Chatim[1]
[1]University of Kassel, Kassel, Germany

In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...